e-gun_evaporator
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| e-gun_evaporator [2018/06/27 08:16] – [The steps] scholma | e-gun_evaporator [2022/06/08 15:27] (current) – removed scholma | ||
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| - | ====== Description ====== | ||
| - | The resistance evaporator is configured for evaporating 3 different materials. It is equipped with a crystal thickness monitor below the shutter to set stable conditions. The sampleholder is loaded via a turbo pumped loadlock. | ||
| - | ====== Current Configuration ====== | ||
| - | - Ag (boat) | ||
| - | - Cr (wire), 3x25A, 1.5V, 0.3A/s | ||
| - | - Au (boat), 3x60A, 2.5V, 2.5A/s | ||
| - | |||
| - | ====== Manual ====== | ||
| - | ==== The warnings ==== | ||
| - | * Touch vacuum parts only with // | ||
| - | * The vacuum control is not protected. Be careful to operate the roughing valves in the correct way! Opening a roughing valve to a vented chamber while the other valve is open will cause irrepairable damage! | ||
| - | * Tighten the ISO-k clamps! Otherwise the loadlock turbo will crash in case of misalignment! | ||
| - | * Do not hot switch the selector, this will burn the relay contacts! | ||
| - | * Do not wait after obtaining a stable evaporation rate for Au, it wastes material | ||
| - | * Be very careful not to make a short when switching over the multimeter | ||
| - | |||
| - | ==== Loading the sample ==== | ||
| - | * Write name, date, sample, materials & thicknesses in the logbook | ||
| - | * Check that the system is in the standby state with chamber and loadlock pumping | ||
| - | * Switch off loadlock ion gauge | ||
| - | * Close loadlock roughing valve (red valve on the right) | ||
| - | * Switch off loadlock turbo | ||
| - | * Let in a very small amount of air via the vent knob to decelerate the turbo | ||
| - | * Vent the loadlock, then close the vent knob | ||
| - | * Remove the ISO-k clamps, set the bellow at 150 mm | ||
| - | * Remove the sample holder | ||
| - | * Mount the sample with the springs | ||
| - | * Load the sample holder | ||
| - | * Tighten the ISO-k clamps | ||
| - | * Close chamber roughing valve (red valve on the left), do not leave the system >5 minutes in this state | ||
| - | * Open loadlock roughing valve slowly | ||
| - | * When p<1e-1 mbar, switch on turbo | ||
| - | * When p<1e-3 mbar, open chamber roughing line | ||
| - | * Wait till desired loadlock pressure is reached (always <1e-6 mbar) | ||
| - | |||
| - | ==== System start ==== | ||
| - | * Cooling water on (front up+down valves), check that feedthroughs get cold | ||
| - | * Check that tooling factor is 21% | ||
| - | * Check that chamber and loadlock pressures both low, open gate valve | ||
| - | * turn bellows to 0 mm (but not further!) | ||
| - | |||
| - | ==== Repeat for each layer ==== | ||
| - | * Wire multimeter to correct connection | ||
| - | * Verify whether shutter is closed (screw lines up with chamber) | ||
| - | * Set the density and Z-ratio for the desired material | ||
| - | * Switch switchbox to the correct boat/rod | ||
| - | * Switch on all 3 power supplies | ||
| - | * Heat slowly (in 3 min) till the desired rate is reached | ||
| - | * Open shutter, zero XTC, push shutter open | ||
| - | * When desired thickness reached, close shutter | ||
| - | * slowly reduce current, turn off supplies | ||
| - | |||
| - | ==== Stopping the system ==== | ||
| - | * Cooling water off | ||
| - | * Boat selector to Off | ||
| - | * Turn bellows up to 155 mm | ||
| - | * Close gate valve | ||
| - | |||
| - | ==== Removing the sample ==== | ||
| - | * Switch off loadlock ion gauge | ||
| - | * Close loadlock roughing valve (red valve on the right) | ||
| - | * Switch off loadlock turbo | ||
| - | * Let in a very small amount of air via the vent knob to decelerate the turbo | ||
| - | * Vent the loadlock, then close the vent knob | ||
| - | * Remove the sample holder | ||
| - | * Put the sample stick back, tighten the ISO-k clamps | ||
| - | * Close chamber roughing valve (red valve on the left), do not leave the system >5 minutes in this state | ||
| - | * Open loadlock roughing valve slowly | ||
| - | * When p<1e-1 mbar, switch on turbo | ||
| - | * When p<1e-3 mbar, open chamber roughing line | ||
| - | ====== Calibrations ====== | ||
| - | ^ Material ^ Date ^ Sample ID ^ Process parameters | ||
| - | | Au | 20110110 | ||
| - | |||
| - | ====== Sample holder chiller ====== | ||
| - | ==== Flashing display ==== | ||
| - | An uncontrollable chiller with a flashing display means that there is a firmware bug. The first fix to try is: | ||
| - | * Switch off chiller | ||
| - | * Press and hold down the rotating knob | ||
| - | * Switch on chiller | ||
| - | * Release knob | ||
| - | |||
| - | This should start up the chiller again with normal functionality. | ||
| - | If the problem still persists try to install (overwrite) the firmware by following this manual: {{: | ||
| - | |||
| - | ====== Recipe for flat Au films on Mica ====== | ||
| - | This recipe is used for making flat epitaxial Au films on mica in the resistance evaporator by using the heated sample holder. It consists of a copper heating block with a thermocouple placed inside and the copper wires sticking out from the sample holder are connected to the power source, and the steel wires are connected to the voltage meter (that measures temperature based on thermocouple measurements). The calibration list is given on near the log book. | ||
| - | |||
| - | ==== The steps ==== | ||
| - | * Cut mica sheet to your required sample size with mica cutter | ||
| - | * Mount on the mica sample on the copper heating block with the fleshly cleaved side up | ||
| - | * Install the cover on the sample holder | ||
| - | * Install the sample holder in the system and pump down (see above) to < 3.5E-7 mbar | ||
| - | * Heat the sample to 500 °C for 6-12 hours | ||
| - | * Decrease the temperature to 350 °C (it might also work 330-375 °C) | ||
| - | * Increase the deposition rate to >0.3 nm/s with the shutter closed for several minutes | ||
| - | * Set the rate to 0.3 nm/s, open shutter and start deposition | ||
| - | * Close shutter when 100 nm Au is deposited | ||
| - | * Anneal for 1 hour at 350 °C | ||
| - | * Cool the sample holder by venting the system with N< | ||
| - | |||
| - | |||
| - | [[Technicians: | ||
e-gun_evaporator.1530087410.txt.gz · Last modified: 2018/06/27 08:16 by scholma