equipment_manuals
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| equipment_manuals [2022/06/15 13:56] – scholma | equipment_manuals [2025/07/29 10:16] (current) – [Manuals] wigbout | ||
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| ====== Manuals ====== | ====== Manuals ====== | ||
| - | * [[Thermofisher ApreoSEM|ApreoSEM Thermofisher]] | + | === Lithography Processes === |
| - | * [[ATC-1800# | + | * [[SPIN150i POLOS spin coater|Spin coater POLOS SPIN150i]] |
| - | * [[Bruker DektakXT profilometer|Bruker DektakXT profilometer]] | + | * [[Resist and e-beam recipes|Resist recipes]] |
| - | * [[Dishwasher cleanroom|Dishwasher cleanroom]] | + | |
| * [[EBPG Raith-100|EBPG Raith-100]] | * [[EBPG Raith-100|EBPG Raith-100]] | ||
| - | * [[Glovebox]] | ||
| - | * [[Ion beam etcher# | ||
| - | * [[K-Cell evaporator# | ||
| - | * [[Nikon ECLIPSE LV150 optical microscope |Nikon LV150 optical microscope]] | ||
| * [[Mask aligner|Optical lithography KarlSuss MA45 Mask aligner]] | * [[Mask aligner|Optical lithography KarlSuss MA45 Mask aligner]] | ||
| - | * [[Oxides system# | + | |
| + | === Plasma Etching === | ||
| + | * [[Plasma Cleaner PDF-32G-2|Plasma Cleaner PDF-32G-2]] | ||
| * [[PlasmaLab 90+|Plasmalab Reactive Ion Etcher]] | * [[PlasmaLab 90+|Plasmalab Reactive Ion Etcher]] | ||
| - | * [[PPMS]] | + | * [[Ion beam etcher# |
| - | * [[PPMS helium transfer]] | + | |
| - | * [[Resist and e-beam recipes|Resist recipes]] | + | === Annealing === |
| - | * [[SPIN150i POLOS spin coater|Spin coater POLOS SPIN150i]] | + | * [[Thermcraft Tube Oven#manual|Tube Oven - H2, Ar and Vacuum Annealing]] |
| - | * [[cressington_sputter_coater_208hr|Sputter coater Cressington 208hr]] | + | * [[Lindberg/ |
| - | * [[Thermcraft Tube Oven# | + | |
| + | === Vapor Deposition === | ||
| * [[Resistance evaporator manual|Resistance evaporator]] | * [[Resistance evaporator manual|Resistance evaporator]] | ||
| + | * [[E-beam evaporator# | ||
| + | * [[K-Cell evaporator# | ||
| + | |||
| + | === Sputter Depostion === | ||
| + | * [[ATC-1800# | ||
| * [[UHV system# | * [[UHV system# | ||
| - | * [[E-gun evaporator# | + | * [[Z-400# |
| - | * [[Wire bonder# | + | |
| - | * [[Z-400# | + | |
| * [[Z-407# | * [[Z-407# | ||
| + | * [[Oxides system# | ||
| + | * [[cressington_sputter_coater_208hr|Cressington 208hr sputter coater]] | ||
| + | |||
| + | === Inspection === | ||
| + | * [[Thermofisher ApreoSEM|ApreoSEM Thermofisher]] | ||
| + | * [[Nikon ECLIPSE LV150 optical microscope |Nikon LV150 optical microscope]] | ||
| + | * [[Bruker DektakXT profilometer|Bruker DektakXT profilometer]] | ||
| + | |||
| + | |||
| + | |||
| + | |||
| + | ==== Other utilities ==== | ||
| + | * [[Wire bonder# | ||
| + | * [[Dishwasher cleanroom|Dishwasher cleanroom]] | ||
| + | \\ | ||
| + | \\ | ||
| + | \\ | ||
| + | \\ | ||
| + | \\ | ||
| + | \\ | ||
| ====== Outdated Manuals ====== | ====== Outdated Manuals ====== | ||
| Line 50: | Line 71: | ||
| * [[MPMS-5S helium transfer|MPMS-5S (SQUID) helium transfer]] | * [[MPMS-5S helium transfer|MPMS-5S (SQUID) helium transfer]] | ||
| * [[Optical lithography# | * [[Optical lithography# | ||
| + | * [[PPMS]] | ||
| + | * [[PPMS helium transfer]] | ||
| * [[Siemens D5005, reflectometry]] | * [[Siemens D5005, reflectometry]] | ||
| * [[VCN info]] | * [[VCN info]] | ||
equipment_manuals.1655301380.txt.gz · Last modified: 2022/06/15 13:56 by scholma