Differences

This shows you the differences between two versions of the page.

--- fei_nanosem_200 [2008/03/17 14:45] – M=2000 hessel
+++ fei_nanosem_200 [2017/04/03 12:41] (current) – [Manual] scholma
@@ Line 43: / Line 43: @@
    * **Make sure prep vacuum and airlock vacuum are OK** when operating the loadlock
    * In normal operation, the xT microscope server must always run. If it stops, restart it immediately and check source current (should be around 200 uA)
-   * If the system has gone to the emergency shutdown mode, the UPS will keep powering the IGP's for 2 hours. **A SEM administrator must restart the electron gun within that amount of time**, otherwise FEI service has to come. Warn [[Marcel Hesselberth|Marcel]] (room 609a, phone 0650 2 6789 5 or 071 5 222 679)
+   * If the system has gone to the emergency shutdown mode, the UPS will keep powering the IGP's for 2 hours. **A SEM administrator must restart the electron gun within that amount of time**, otherwise FEI service has to come. Warn [[Marcel Hesselberth|Marcel]] (room 609a, phone 0646 29 59 00 or 071 5 222 679)
    * Prepare and mount samples on the preparation table. **No liquids** (solvents and other chemicals, silver/carbon paint, coffee and other beverages) are placed on the SEM column or the terminal table.
    * **It is TOTALLY, UNDER ALL CONDITIONS forbidden to change the state of the control PC.** You are not allowed to save a single file there, install a program, put in a CD, floppy or USB stick, it is not even allowed to change an icon on the desktop! All you do there is double click on the microscope server if necessary, start the User Interface and operate it. Data is saved via a share in the users/yourname directory that has been created on the data PC
@@ Line 61: / Line 61: @@
   - Before starting, fill out the logbook
   - Prepare your sample on the preparation table, mount it on a stub
-  - Log out if necessary, login
   - Click 'Vent'
-  - Unfreeze CCD
+  - Make sure CCD (bottom right screen) is unfrozen.
   - Mount the stub onto the stage, use the elephant to set a safe height
-  - Check CCD when closing chamber
+  - Keep an eye on CCD when closing the chamber
   - Click 'Pump'
-  - Wait until a low enough final pressure is reached
+  - Wait until a 1e-5 mbar is reached
   - Choose HV and spot
-  - Click 'HV'
+  - Click 'HV' to turn on the beam.
   - Adjust contrast and brightness
   - Focus (on the highest point of the sample) at a magnification > 2000 times
   - Link Z to FWD
-  - Drive sample up to 10-15 mm, check CCD, be prepared to hit 'Esc'
+  - Drive sample up to 10-15 mm, check CCD, keep finger above 'ESC-key'
   - Focus well at a magnification >2000 times
   - Link Z to FWD again
   - Drive sample up to the working height, check CCD, be prepared to hit 'Esc'
   - Set eucentric if necessary (see below)
+  - LOCK Z-axis. Now you can switch to single-view.
   - You are in search mode, go to the feature of interest
   - Increase magnification
   - Switch to UHR mode (for a nonmagnetic sample)
-  - Focus, correct astigmatism
+  - Focus, correct astigmatism, lens alignment
   - Collect data
-  - When ready, click 'Vent' (High voltage, detectors and pumps are automatically switched off, stage drives down in a safe way)
+  - Fill in logbook before venting
+  - Go to QUAD-view, unlock Z
+  - When ready, click 'Vent' (High voltage, detectors and pumps are automatically switched off, stage drives down in a safe way), be prepared to hit 'ESC'
   - Remove your specimen stub
-  - Call next user or pump down in 'HV' mode (don't keep chamber vented for a significant amount of time)
+  - Call next user or pump down (don't keep chamber vented for a significant amount of time)
-  - Log out and close the log entry in the logbook
   - At the end of the day, switch off the displays
   - Go to your PC and transfer the data
@@ Line 99: / Line 100: @@
   - Go to 0 tilt and repeat this procedure for the maximum tilt you want to achieve
   - You now have the eucentric condition
+If the microscope computer crashes:
+  - restart computer
+  - start the "XT microscope server" program
+    * all 3 indicators on the right must be green, if not, call Marcel
+  - press "start"
+  - check if ALL indicators below become green (initialized), in case not, call Marcel
+  - start UI, check pressure.
 ====== Deposition rates ======
@@ Line 106: / Line 115: @@
 ^ Material ^  Date     ^ Sample ID ^ Process parameters                         ^ Measured with  ^ Result         ^ Rate  ^
-| Pt       | 20050415  | Pt1 (Marcel) | Spot 5, 50% overlap, 1000 passes, 1 us dwell  | AFM            | to be measured | -     |
+| Pt       | 20050415  | Pt1 (Marcel) | Spot 5, 50% overlap, 1000 passes, 1 us dwell  | AFM            | | -     |
 |Pt        | 20050601  | Pt (Christianne)| Spot 4, 50% overlap, 248932 passes, 1 us dwell, Vol per Dose = 0.0178 um3/nC, Z-size = 500 nm | nanoSEM (43 degrees tilt) |  thickness: 495 nm (+/- 20 nm)   | -|