plasma_cleaner_pdf-32g-2
Differences
This shows you the differences between two versions of the page.
| Both sides previous revisionPrevious revisionNext revision | Previous revision | ||
| plasma_cleaner_pdf-32g-2 [2023/02/02 14:38] – [Recipes] scholma | plasma_cleaner_pdf-32g-2 [2023/02/24 07:56] (current) – [MANUAL] scholma | ||
|---|---|---|---|
| Line 4: | Line 4: | ||
| ==== DO's and DONT's ==== | ==== DO's and DONT's ==== | ||
| - | Only use bare substrate in the plasma cleaner | + | Only use bare substrate in the plasma cleaner, all exceptions should be discussed. |
| * Si | * Si | ||
| * SiO2 | * SiO2 | ||
| * glass/ | * glass/ | ||
| - | all exceptions should be discussed | + | |
| ==== MANUAL ==== | ==== MANUAL ==== | ||
| - | * Stop the vacuum pump | + | * Load samples |
| - | * Turn valve to the right to vent | + | * Start the vacuum pump while holding the door, make sure black valve is pointing down |
| - | * vent slowly to avoid samples | + | |
| - | * Load samples | + | |
| - | * Close vent valve (valve pointing down) | + | |
| - | * Start the vacuum pump, hodor | + | |
| * Pump down to < | * Pump down to < | ||
| - | * Set valve to the needle valve | + | * Set black valve to the needle valve |
| - | * if needle is open pressure should go to previous setpoint (check the logbook) | + | * if needle |
| * or change the setpoint | * or change the setpoint | ||
| * Wait for pressure to stabilize | * Wait for pressure to stabilize | ||
| Line 26: | Line 22: | ||
| * When plasma ignites start your timer | * When plasma ignites start your timer | ||
| * Turn off RF when timer finishes | * Turn off RF when timer finishes | ||
| - | * Close valve (valve pointing down) | + | * Close black valve (valve pointing down) |
| - | * Pump down to < | + | * Pump down to < |
| * Stop the vacuum pump | * Stop the vacuum pump | ||
| - | * Vent (valve pointing | + | * Turn black valve to the right to vent |
| - | * Close vent valve (valve pointing down) | + | * vent slowly to avoid samples flying around in the chamber |
| - | * Pump down | + | * Close black valve (valve pointing down) |
| - | + | * close the door | |
| - | + | * write in the logbook: name, date, sample, process conditions, any remarks | |
| - | ==== Common problems, tips and tricks ==== | + | |
| - | + | ||
| - | + | ||
| ==== Recipes ==== | ==== Recipes ==== | ||
| - | Ttypical | + | Typical |
| 500-900mTorr\\ | 500-900mTorr\\ | ||
| 1-3 minutes\\ | 1-3 minutes\\ | ||
| Line 48: | Line 40: | ||
| Tip seal change of vacuum pump\\ | Tip seal change of vacuum pump\\ | ||
| + | Cleaning sample tray and chamber\\ | ||
plasma_cleaner_pdf-32g-2.1675348722.txt.gz · Last modified: 2023/02/02 14:38 by scholma