Differences

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--- plasma_cleaner_pdf-32g-2 [2023/02/20 10:21] – [Common problems, tips and tricks] scholma
+++ plasma_cleaner_pdf-32g-2 [2023/02/24 07:56] (current) – [MANUAL] scholma
@@ Line 12: / Line 12: @@
 ==== MANUAL ====
-  * Load samples
+  * Load samples on the sample tray
-  * Start the vacuum pump, hodor
+  * Start the vacuum pump while holding the door, make sure black valve is pointing down
   * Pump down to <100mTorr
-  * Set valve to the needle valve
+  * Set black valve to the needle valve
-    * if needle is open pressure should go to previous setpoint (check the logbook)
+    * if needle valve is open the pressure should go to previous setpoint (check the logbook)
     * or change the setpoint
   * Wait for pressure to stabilize
@@ Line 22: / Line 22: @@
   * When plasma ignites start your timer
   * Turn off RF when timer finishes
-  * Close valve (valve pointing down)
+  * Close black valve (valve pointing down)
-  * Pump down to <100mTorr
+  * Pump down to <100mTorr to make sure etch products are removed from the chamber
   * Stop the vacuum pump
-  * Turn valve to the right to vent
+  * Turn black valve to the right to vent
     * vent slowly to avoid samples flying around in the chamber
-  * Close vent valve (valve pointing down)
+  * Close black valve (valve pointing down)
+  * close the door
+  * write in the logbook: name, date, sample, process conditions, any remarks
 ==== Recipes ====
 Typical cleaning process:\\
@@ Line 45: / Line 40: @@
 Tip seal change of vacuum pump\\
+Cleaning sample tray and chamber\\