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--- plasmalab_90_logbook [2006/09/06 15:50] – hessel
+++ plasmalab_90_logbook [2006/09/11 16:30] (current) – hessel
@@ Line 1: / Line 1: @@
+====TODO====
+  - Chiller temp can be measured (D connector has 0-10V in and out, conversion to C has a weird 10C offset) build thermometer for this
+  - Install new baratron (expected 20060915)
+  - Connect pump exhaust, gaspod and gas cabinet to building exhaust (vastgoed)
+  - Detailed vacuum leak tests
+  - MFC calibration for gases used
+  - Change 380V wall socket plug (25A, 4 mm2 wires)
+  - Build PL7 interlock box
+  - Get 2 25cm diameter (very pure) quartz wafers (Chris)
+  - Repair or replace vacustat
+====20060911====
+  - MFC's swapped, O2 and Ar are calibrated for those gases, vacuum leaktest OK (0.0 mtorr/min)
+  - Green gasline to 607 cut & sealed, now dedicated for O2 of both etchers
+  - Burned 2 CD's with mirror of Oxford PC installation
+  - BAM made the planning for the building exhaust line
+====20060904====
+  * Chamber pumped to 4e-6 mbar, OK
+  * Overpressure tests of SF6, CF4, O2 and Ar lines performed (6 bar), no failures, no leaks
+  * Vacuum tests of all gaslines, all 0.0 mtorr/min (chamber) leak rate but mass flow controllers still have to be swapped
+  * Backups of computer made
+====20060901====
+  * System installed
+  * Reactor removed from chamber, fully disassembled and cleaned
+  * Chamber turbo cleaning / revision
+  * VAT valve disassembly / cleaning
+  * MKS control valve disassembly cleaning
+  * Rough vacuum hoses and connectors disassembled/cleaned
+  * Leybold valves cleaned
+  * Pressure gauges cleaned, new baratron ordered
+  * Gas line overpressure tests (6 bar)
+  * Gas line overpressure leak tests (no measurable loss overnight)
+  * System reassembled
+  * Test run
+BCl3 residue easily soluble in water