resist_and_e-beam_recipes
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| resist_and_e-beam_recipes [2018/09/03 09:28] – [Recipes summary] scholma | resist_and_e-beam_recipes [2018/11/19 08:32] (current) – [Electra92] scholma | ||
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| * spin at 4000 rpm | * spin at 4000 rpm | ||
| * one layer should be enough | * one layer should be enough | ||
| + | * bake at 105 °C for 5min on hot plate | ||
| * rinse with water before developing | * rinse with water before developing | ||
resist_and_e-beam_recipes.1535966884.txt.gz · Last modified: 2018/09/03 09:28 by scholma