sdb:cumn20060511
Differences
This shows you the differences between two versions of the page.
| Both sides previous revisionPrevious revision | |||
| sdb:cumn20060511 [2006/05/15 15:00] – hessel | sdb:cumn20060511 [2018/06/27 10:30] (current) – removed scholma | ||
|---|---|---|---|
| Line 1: | Line 1: | ||
| - | Deposition date: 20060511 | ||
| - | ---- | ||
| - | Target: AgMn compound target (arc molten here) \\ | ||
| - | Pressure: 10 mtorr Ar | ||
| - | Flow: 25 ml/min | ||
| - | Current: 100 mA \\ | ||
| - | Voltage: 460 V \\ | ||
| - | Time: 10 min \\ | ||
| - | Temp: RT \\ | ||
| - | Remarks: This was a AgMn target; CuMn target is finished! | ||
| - | ---- | ||
| - | RBS: \\ | ||
| - | Run: 20060512 \\ | ||
| - | File: cumn.rbs \\ | ||
| - | Result: 18 nm Ag 11 Mn 89 \\ | ||
| - | Postscript: {{sdb: | ||
| - | ---- | ||
sdb/cumn20060511.1147705257.txt.gz · Last modified: 2006/05/15 15:00 by hessel