Differences

This shows you the differences between two versions of the page.

--- spin_coater [2006/01/20 11:27] – (old revision restored) 127.0.0.1
+++ spin_coater [2017/02/08 13:49] (current) – [Manual] scholma
@@ Line 1: / Line 1: @@
+====== Description ======
+The spin coater in the cleanroom can be used for spin coating resists //only//.
+====== Manual ======
+  - Cover the spin bowl completely with aluminium foil
+  - Switch on vacuum (black button)
+  - Push 'change pre' and select a recipe
+  - Clean bottom of sample, place it (centered) on the chuck
+  - Mount a tip on the pipet
+  - Open the resist bottle, fill the pipet at the surface, avoid getting air in
+  - Push air bubbles out
+  - Cover the sample with resist, push the start button and immediately place the cover
+  - Dispose the pipet tip and **right away** close the resist bottle
+  - When done, open cover, remove sample and bake
+  - Clean resist spills with acetone
+**Warning: recipes 1 and 2 (4000 and 6000 rpm) are standardized, do not change them! Use recipe 3 instead.**
+To change between the standard recipes, you need to operate on the keyboard of the spin coater (that has no labels anymore). The keyboard has 10 buttons in 2 rows.
+|  _1_  |  _2_  |
+|  _3_  |  _4_  |
+|  _5_  |  _6_  |
+|  _7_  |  _8_  |
+|  _9_  |  _10_  |
+  * _1_ : edit
+  * _2_ : end edit
+  * _5_ : _6_ move cursor
+  * _7_ : (-) or 8 (+) to adjust
+  * _10_ : Enter
+====== Settings ======
+^ Recipe ^  Step ^ RPM   ^  Ramp ^ Time ^
+| 1      |  1    | 400   |  2    | 5    |
+| 1      |  2    | 4000  |  2    | 1    |
+| 1      |  3    | 6000  |  6    | 50   |
+| 2      |  1    | 400   |  2    | 5    |
+| 2      |  2    | 4000  |  4    | 1    |
+| 2      |  3    | 4000  |  5    | 50   |
+====== Miscellaneous ======
+  * The digital log sheet: {{:wiki:spincoater_logbook.pdf|}}