z-400
Differences
This shows you the differences between two versions of the page.
| Both sides previous revisionPrevious revisionNext revision | Previous revision | ||
| z-400 [2021/10/11 10:25] – scholma | z-400 [2025/02/11 08:01] (current) – boltje | ||
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| ===== Switch off the pumps ===== | ===== Switch off the pumps ===== | ||
| - | - Check that the mass flow controller valve is closed (indicated by Close in the software) | + | - Check that the mass flow controller valve is closed (indicated by CloseMFC |
| - Close the green valve while holding the tubing (until the arrow points in the middle of the red marker). It needs to be tight, the valve has a end stop | - Close the green valve while holding the tubing (until the arrow points in the middle of the red marker). It needs to be tight, the valve has a end stop | ||
| - Target cooling water should be turned off | - Target cooling water should be turned off | ||
| Line 17: | Line 17: | ||
| ===== Vent the chamber ===== | ===== Vent the chamber ===== | ||
| - | - Decelerate the turbo by slowly venting to 5 mbar using the needle valve and closing it at 5 mbar. **WAIT 5 MINUTES**. | + | - Decelerate the turbo by slowly venting to 5 mbar using the needle valve and closing it at 5 mbar. |
| + | - **WAIT 5 MINUTES**. | ||
| - Now, vent the chamber completely to atmospheric pressure and close the vent valve. | - Now, vent the chamber completely to atmospheric pressure and close the vent valve. | ||
| - Open the flip-top lid. | - Open the flip-top lid. | ||
| Line 30: | Line 31: | ||
| - Start vacuum | - Start vacuum | ||
| - When the pressure drops below 1e-2 mbar, open the green valve (use both hands) to keep the gas line clean. | - When the pressure drops below 1e-2 mbar, open the green valve (use both hands) to keep the gas line clean. | ||
| - | - Pump down to <1e-5mbar (pressure interlock | + | - Pump down to base pressure |
| ===== Sputter ===== | ===== Sputter ===== | ||
| - Note background pressure in logbook. | - Note background pressure in logbook. | ||
| - Switch on target cooling water | - Switch on target cooling water | ||
| - Sputtering process | - Sputtering process | ||
| - | - Select target with HV target selector knob (left of the chamber). | + | - Select target with HV target selector knob (left of the chamber) |
| + | - **never operate HV target selector with HV on** | ||
| - Switch on power supply (red turning knob). It takes 2 minutes for the RF generator to warm up. | - Switch on power supply (red turning knob). It takes 2 minutes for the RF generator to warm up. | ||
| - | - Check the timings and positions for the (pre) sputtering, | + | - Check the timings and positions for the (pre) sputtering, note this in the logbook. |
| - Set the target to the pre sputter position. | - Set the target to the pre sputter position. | ||
| - Set the Argon flow setpoint (using the software, usually around 30-50 sccm) | - Set the Argon flow setpoint (using the software, usually around 30-50 sccm) | ||
| Line 48: | Line 49: | ||
| - Increase the flow setpoint temporarily to 70 sscm and check that the pressure rises. | - Increase the flow setpoint temporarily to 70 sscm and check that the pressure rises. | ||
| - Wait until the plasma ignites (right display shows non-zero value). | - Wait until the plasma ignites (right display shows non-zero value). | ||
| - | | + | - check that the ignited target is at pre sputter position (look through window, purple glow at front position). |
| - | - Next set the flow to the original value and check that the pressure | + | - Next set the flow to the original value and check that the pressure |
| - Set the DC potential to the desired value (typically 1 kV). | - Set the DC potential to the desired value (typically 1 kV). | ||
| - With the pressure and the plasma stable, start your process (pre sputtering, sputtering with the correct timings and positions). | - With the pressure and the plasma stable, start your process (pre sputtering, sputtering with the correct timings and positions). | ||
| Line 60: | Line 61: | ||
| - Switch off HV power supply (left red turning knob). | - Switch off HV power supply (left red turning knob). | ||
| - Switch off target cooling water. | - Switch off target cooling water. | ||
| - | - Close green valve (use both hands). | + | - Close green valve (hold the gasline with one hand). |
| - | - Let the cooled substrates warm up before venting the chamber | + | - Let a cooled substrates warm up before venting the chamber. |
| - vent the chamber (see above) | - vent the chamber (see above) | ||
| - | - remove sample and clean sputterplate if needed | + | - remove sample and clean sputterplate if you used silverpaint to glue the sample |
| - | - pump down (make sure to open the green valve below 1e-2mbar before leaving) | + | - pump down (make sure to open the green valve below 1e-2mbar before leaving |
| ====== Target Materials ====== | ====== Target Materials ====== | ||
| Line 185: | Line 186: | ||
| ^ Material ^ Date ^ User ^ Pressure ^ DC Potential ^ Flow ^ Time ^ Measurement ^ Result ^ Rate ^ Notes ^ | ^ Material ^ Date ^ User ^ Pressure ^ DC Potential ^ Flow ^ Time ^ Measurement ^ Result ^ Rate ^ Notes ^ | ||
| - | | | | | | + | | SiO< |
| | | | | | | | | ||
| ---- | ---- | ||
z-400.1633947913.txt.gz · Last modified: 2021/10/11 10:25 by scholma