z-400
Differences
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| Both sides previous revisionPrevious revisionNext revision | Previous revision | ||
| z-400 [2021/10/11 13:29] – scholma | z-400 [2025/02/11 08:01] (current) – boltje | ||
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| - Start vacuum | - Start vacuum | ||
| - When the pressure drops below 1e-2 mbar, open the green valve (use both hands) to keep the gas line clean. | - When the pressure drops below 1e-2 mbar, open the green valve (use both hands) to keep the gas line clean. | ||
| - | - Pump down to base pressure <1e-5mbar (pressure interlock ensures you cannot start power supply if base pressure wasn't achieved) | + | - Pump down to base pressure <8e-5mbar (pressure interlock ensures you cannot start power supply if base pressure wasn't achieved) |
| ===== Sputter ===== | ===== Sputter ===== | ||
| - Note background pressure in logbook. | - Note background pressure in logbook. | ||
| Line 187: | Line 186: | ||
| ^ Material ^ Date ^ User ^ Pressure ^ DC Potential ^ Flow ^ Time ^ Measurement ^ Result ^ Rate ^ Notes ^ | ^ Material ^ Date ^ User ^ Pressure ^ DC Potential ^ Flow ^ Time ^ Measurement ^ Result ^ Rate ^ Notes ^ | ||
| - | | | | | | + | | SiO< |
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z-400.1633958965.txt.gz · Last modified: 2021/10/11 13:29 by scholma