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====== Description ======
  * very easy & fast to use, for, e.g., SEM sample metallization
  * background pressure: <1E-6mbar, 650V, <150mA, 54mm targets
  * no substrate cooling

====== Manual ======
===== Start up & Loading sample =====
  * Open N2 line at the wall 1/2 turn (check pressure reducer)
  * Open Ar bottle and the in-line valve in the yellow cabinet
  * Check if the required target material is in 
  * If system is vented, insert your sample and close the top
  * Switch on system mains (green switch)
  * Switch on chiller (below the table)

===== Sputtering =====
  * Purge the argon line by opening the needle valve and repeatedly opening and closing the argon valve at the bottle
  * Carefully close the needle valve to pump down
  * Switch turbo on at 1e-1 mbar by pressing "pumping unit" and "stand by" on the turbo controller 
  * Adjust pressure using needle valve to 5E-2mbar
  * Set current dial knob to 0 and switch to "HTS"
  * Select sputtering time and press start
  * Adjust current dial for desired current (lower-righ indicator!)
  * Wait
  * Switch turbo pump off
  * If turbo stands still, switch off machine (green button), automatic N2 purging starts
  * Close Ar, N2 supply ; switch off chiller


===== change target =====
  * open sputter head, fix head,
  * remove the two rings (with gloves, no force!)
  * replace target (manual: 54mm diameter)
  * note target material on machine!


====== recent rates & other info ======


^ Material             ^  Date    ^ purpose        ^ Process parameters    ^ Measurement ^ Result      ^ Rate          ^
| Ag (?)               | 20110623 | SEM of SU-8    | 5E-2 mbar, 15 mA, 15s | SEM pic     | nice      |         |

====== bugs ======
===== yellow HV light does not go on =====
Don't do this because of high voltage in the machine!

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