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^ Material ^  Date     ^ Sample ID     ^ Process parameters                           ^ Measured with  ^ Result  ^ Rate         ^
| AgMn     | 20070305  | AgMn 74 min   | 10 mTorr, 50 mA, 74 min                   | X-ray          | 51.0 nm | 0.688 nm/min   |
| Au       | 20051104  | Amy Au        | 10 mTorr, 100 mA, 10 min                  | X-ray          | 91.9 nm | 9.2 nm/min    |
| Au       | 20070405  | 040507f       | 10 mTorr, 100 mA, 4 min                   | X-ray          | 31.9 nm    | 7.98 nm/min   |
| Au       | 20080310  | Jorina Au     | 10 mTorr, 100 mA, 5 min                   | X-ray          | 45.7 nm    | 9.14 nm/min   |
| Au       | 20080918  | Jorina Au     | 10 mTorr, 100 mA, 3 min                   | X-ray          | 25.5 nm    | 8.5 nm/min  |
| Au       | 20090401  | Au 5 min      | 10 mTorr, 100 mA, 5 min                   | X-ray          | 45.3 nm    | 9.06 nm/min  |
| Au       | 20100723  | AuonSi        | 10 mTorr, 70 mA, 5 min                    | X-ray          | 28.6 nm    | 5.7 nm/min |
| AuFe6%   | 20051104  | Amy AuFe      | 10 mTorr, 100 mA, 10 min                  | X-ray          | 60.6 nm    | 6.1 nm/min    |
| AuFe6%   | 20080310  | Jorina AuFe   | 10 mTorr, 100 mA, 5 min                   | X-ray          | 35.3 nm    | 7.06 nm/min    |
| AuFe6%   | 20080911  | Jorina AuFe   | 10 mTorr, 100 mA, 5 min                   | X-ray          | 36.4 nm    | 7.28 nm/min  |
| Cr       | 20120320  | Cr_cal        |  2 mTorr, 100 mA, 10 min                  | X-ray          | 16.9 nm    | 1.69 nm/min  |
| Cr       | 20120417  | Cr_cal        |  2 mTorr, 100 mA, 10 min                  | X-ray          | 16.9 nm    | 1.69 nm/min  |
| Cr       | 20100929  | CronSi        | 5 mTorr, 100 mA, 15 min                   | X-ray          | 20.1 nm    | 1.34 nm/min  |
| Cr*      | 20110713  | Cr_cal        | 2 mTorr, 100 mA, 10 min                   | X-ray          | 19.0 nm    | 1.90 nm/min  |
| Cr       | 20101129  | Cronglass     | 2 mTorr, 100mA, 250°C, 32m29s             | X-ray          | 62.5 nm    | 1.92 nm/min  |
| Cr       | 20110110  | Cr-03403      | 2 mTorr, 150mA, 250°C, 10m30s             | X-ray          | 29.5 nm    | 2.81 nm/min  |
| Cr       | 20110111  | Cr-03501      | 2 mTorr, 200mA, 250°C, 10 min             | X-ray          | 39.6 nm    | 3.96 nm/min  |
| Cr [1]   | 20111001  | Cr-cal        |  2 mTorr, 100 mA, 10 min                  | X-ray          | 20.1 nm    | 2.01 nm/min  |
| Cr [1]*  | 20111013  | Cr-cal        |  2 mTorr, 100 mA, 10 min                  | X-ray          | 18.8 nm    | 1.88 nm/min  |
| Cr     | 20130118  | Cr_cal   | 2 mTorr, 100 mA, 15 min                   | X-ray          | 22.4 nm | 1.493 nm/min   |
| Cu       | 20111104  | Cu-cal        |  5 mTorr, 100 mA, 10 min                  | X-ray          | 41.4 nm    | 4.14 nm/min  |
| Cu       | 20120320  | Cu-cal        |  5 mTorr, 100 mA, 10 min                  | X-ray          | 39.9 nm    | 3.99 nm/min  |
| Cu       | 20120417  | Cu-cal        |  5 mTorr,  50 mA, 10 min                  | X-ray          | 17.9 nm    | 1.79 nm/min  |
| Cu       | 20120523  | Cu-cal-atc    |  5 mTorr,  50 mA, 15 min                  | X-ray          | 27.3 nm    | 1.82 nm/min  |
| Cu       | 20130118  | Cu_cal        | 5 mTorr,  50 mA, 15 min                   | X-ray          | 22.7 nm    | 1.135 nm/min   |
| Co       | 20120320  | Co-cal-50mA   |  5 mTorr,  50 mA, 10 min                  | X-ray          |  9.3 nm    | 0.93 nm/min  |
| Co       | 20120320  | Co-cal-100mA  |  5 mTorr, 100 mA, 10 min                  | X-ray          | 20.4 nm    | 2.04 nm/min  |
| Co       | 20120320  | Co-cal        |  5 mTorr, 100 mA, 10 min                  | X-ray          | 22.0 nm    | 2.20 nm/min  |
| Co       | 20120320  | Co-cal-150mA  |  5 mTorr, 150 mA, 10 min                  | X-ray          | 19.1 nm    | 1.91 nm/min  |
| Co       | 20120412  | Co-cal-75mA   |  5 mTorr, 75  mA, 10 min                  | X-ray          | 6.9 nm     | 0.69 nm/min  |
| Co       | 20120413  | Co-cal-150mA  |  5 mTorr, 150 mA, 10 min                  | X-ray          | 14.5 nm    | 1.45 nm/min  |
| Co       | 20120801  | Co-cal-115mA  |  5 mTorr, 115 mA, 15 min                  | X-ray          | 13.4 nm    | 0.89 nm/min  |
| Co       | 20120801  | Co-cal-190mA  |  5 mTorr, 190 mA, 15 min                  | X-ray          | 22.5 nm    | 1.50 nm/min  |
| Co       | 20121018  | Co_cal        | 5 mTorr, 100 mA, 15 min                   | X-ray          | 12.0 nm    | 0.8 nm/min   |
| Co     | 20130118  | Co_cal   | 5 mTorr, 150 mA, 20 min                   | X-ray          | 26.2 nm | 1.747 nm/min   |
| Fe       | 20070405  | 040507b       | 10 mTorr, 100 mA, 30 min                  | X-ray          | 45.2 nm    | 1.51 nm/min  |
| Ge       | 20090401  | Ge 10 min     | 10 mTorr, 100 mA, 10 min                  | X-ray          | 26 nm      | 2.64 nm/min  |
| Ge       | 20080626  | Ge 10 min     | 10 mTorr, 100 mA, 10 min                  | X-ray          | 21-27 nm   | 2.1-2.7 nm/min  |
| MoGe     | 20072302  | MoGe 5min     | 10 mTorr, 100 mA, 5 min                   | X-ray          | 6.66 nm    | 1.32 nm/min    |
| MoGe     | 20080911  | Jorina MoGe   | 10 mTorr, 100 mA, 10 min                  | X-ray          | 13.6 nm    | 1.36 nm/min |
| Nb       | 20121018  | Nb_cal        | 5 mTorr,  50 mA, 15 min                   | X-ray          | 31.0 nm    | 2.07 nm/min   |
| Pt       | 20121018  | Pt_cal        | 5 mTorr,  50 mA, 15 min                   | X-ray          | 8.6 nm     | 0.57 nm/min   |
| Py     | 20130603  | Py_cal   | 5 mTorr, 150 mA, 30 min                   | X-ray          | 58.8 nm | 1.96  nm/min   |
| Py     | 20130605  | Py_cal   | 2 mTorr, 250 mA, 6 min + 8 sec            | X-ray          | 27.9 nm | 4.549 nm/min   |
| Sm     | 20130118  | Sm_cal   | 5 mTorr,  50 mA, 15 min                   | X-ray          | 14.8 nm | 0.987 nm/min   |
| Sm       | 20120319  | Sm_cal        |  5 mTorr, 100 mA, 10 min                  | X-ray          | 49.9 nm    | 4.99 nm/min |
| Sm       | 20120413  | Sm_cal_50mA   |  5 mTorr,  50 mA, 10 min                  | X-ray          | 26.6 nm    | 2.66 nm/min |
| Sm       | 20120413  | Sm_cal_100mA  |  5 mTorr, 100 mA, 10 min 5 sec            | X-ray          | 53.9 nm    | 5.39 nm/min |
| Sm [3]   | 20120419  | Sm_50mA_06mm  |  5 mTorr, 50 mA, 10 min angle 06mm        | X-ray          | 27.0 nm    | 2.70 nm/min |
| Sm [3]   | 20120419  | Sm_50mA_15mm  |  5 mTorr, 50 mA, 10 min angle 15mm        | X-ray          | 13.4 nm    | 1.34 nm/min |
| Sm [3]   | 20120419  | Sm_50mA_20mm  |  5 mTorr, 50 mA, 21 min angle 20mm        | X-ray          | 9 nm       | 0.43 nm/min |
| Sm [3]   | 2012....  | Sm_30mA_15mm  |  5 mTorr, 30 mA, 15 min angle 15mm        | X-ray          | . nm       | .... nm/min |
| Sm [3]   | 20120802  | Sm_50mA_20mm  |  5 mTorr, 50 mA, 15.30 min angle 15mm     | X-ray          | 16.1 nm    | 1.04 nm/min |
| Sm       | 20121018  | Sm_cal        | 5 mTorr,  50 mA, 15 min                   | X-ray          | .... nm    | ..... nm/min   |
| SmCo<sub>5</sub> | 20100929 | SmCo<sub>5</sub>onSi | 5 mTorr, 100mA, 15 min      | X-ray          | 31.8 nm    | 2.12 nm/min |
| SmCo<sub>5</sub> | 20110324 | Sm_019_cal | 16 mTorr, 150mA, 10 min      | X-ray          | 8.80 nm   | 0.88 nm/min |
| SmCo<sub>5</sub>*| 20110816 | Sm_051_cal | 02 mTorr, 200mA, 10 min      | X-ray          | 50.1 nm   | 5.01 nm/min |
| SmCo<sub>5</sub>*| 20110823 | Sm_052_cal | 03 mTorr, 200mA, 10 min 10s  | X-ray          | 40.0 nm   | 3.93 nm/min |
| SmCo<sub>5</sub>*| 20110816 | Sm_050_cal | 04 mTorr, 200mA, 10 min 05s  | X-ray          | 40.5 nm   | 4.02 nm/min |
| SmCo<sub>5</sub>*| 20110... | Sm_053_cal | 05 mTorr, 200mA, 10 min      | X-ray          | 36.6 nm   | 3.66 nm/min |
| SmCo<sub>5</sub>*| 20110817 | Sm_049_cal | 06 mTorr, 200mA, 10 min      | X-ray          | 34.9 nm   | 3.49 nm/min |
| SmCo<sub>5</sub> | 20110324 | Sm_020_cal | 12 mTorr, 200mA, 10 min      | X-ray          | 18.2 nm   | 1.82 nm/min |
| SmCo<sub>5</sub>*| 20110705 | Sm_045_cal | 14 mTorr, 200mA, 10 min 30s  | X-ray          | 18.9 nm   | 1.80 nm/min |
| SmCo<sub>5</sub> | 20110324 | Sm_021_cal | 16 mTorr, 200mA, 10 min      | X-ray          | 13.1 nm   | 1.31 nm/min |
| SmCo<sub>5</sub>*| 20110712 | Sm_047_cal | 08 mTorr, 250mA, 10 min      | X-ray          | 38.3 nm   | 3.83 nm/min |
| SmCo<sub>5</sub>*| 20110712 | Sm_048_cal | 10 mTorr, 250mA, 10 min      | X-ray          | 32.6 nm   | 3.26 nm/min |
| SmCo<sub>5</sub>*| 20110704 | Sm_038_cal | 12 mTorr, 250mA, 10 min 10s  | X-ray          | 29.0 nm   | 2.85 nm/min |
| SmCo<sub>5</sub> | 20110330 | Sm_026_cal | 14 mTorr, 250mA, 10 min      | X-ray          | 19.2 nm   | 1.92 nm/min |
| SmCo<sub>5</sub>*| 20110713 | Sm_042_cal | 14 mTorr, 250mA, 10 min      | X-ray          | 23.7 nm   | 2.37 nm/min |
| SmCo<sub>5</sub> | 20110324 | Sm_022_cal | 16 mTorr, 250mA, 10 min      | X-ray          | 18.2 nm   | 1.82 nm/min |
| SmCo<sub>5</sub>*| 20110713 | Sm_044_cal | 16 mTorr, 250mA, 10 min      | X-ray          | 20.4 nm   | 2.04 nm/min |
| SmCo<sub>5</sub> | 20110330 | Sm_025_cal | 18 mTorr, 250mA, 10 min      | X-ray          | 14.2 nm   | 1.42 nm/min |
| SmCo<sub>5</sub> | 20110330 | Sm_024_cal | 20 mTorr, 250mA, 10 min      | X-ray          | 12.3 nm   | 1.23 nm/min |
| SmCo<sub>5</sub> | 20110330 | Sm_027_cal | 24 mTorr, 250mA, 10 min      | X-ray          | 10.3 nm   | 1.03 nm/min |
| SmCo5[2] | 20111001  | Sm_cal_2mtorr |  2 mTorr, 200 mA, 10 min                  | X-ray          | 45.5 nm    | 4.55 nm/min |
| SmCo5[2] | 20111001  | Sm_cal_3mtorr |  3 mTorr, 200 mA, 10 min                  | X-ray          | 44.8 nm    | 4.48 nm/min |
| SmCo5[2] | 20111001  | Sm_cal_4mtorr |  4 mTorr, 200 mA, 10 min                  | X-ray          | 43.3 nm    | 4.33 nm/min |
| SmCo5[2]* | 20111013  | Sm_2mtorr_cal |  2 mTorr, 150 mA, 10 min                  | X-ray          | 36.0 nm    | 3.60 nm/min |
| SmCo5[2]* | 20111013  | Sm_3mtorr_cal |  3 mTorr, 180 mA, 10 min                  | X-ray          | 36.0 nm    | 3.60 nm/min |
| SmCo5[2]* | 20111024  | Sm_6mtorr_cal |  6 mTorr, 190 mA, 10 min                  | X-ray          | 29.2 nm    | 2.92 nm/min |
| SmCo5[2]* | 20111024  | Sm_8mtorr_cal |  8 mTorr, 190 mA, 10 min                  | X-ray          | 24.9 nm    | 2.49 nm/min |
| SmCo5[2]* | 20111024  | Sm_12mtorr_cal |  12 mTorr, 190 mA, 10 min                | X-ray          | 18.0 nm    | 1.80 nm/min |
| SmCo5[2]* | 20111031  | Sm_2mtorr_cal |  2 mTorr, 200 mA, 10 min                  | X-ray          | 51.2 nm    | 5.12 nm/min |
| SmCo5[2]* | 20111027  | Sm_3mtorr_cal |  3 mTorr, 200 mA, 10 min                  | X-ray          | 39.5 nm    | 3.95 nm/min |
| SmCo5[2]* | 20111027  | Sm_4mtorr_cal |  4 mTorr, 200 mA, 10 min                  | X-ray          | 35.6 nm    | 3.56 nm/min |

* New target june 2011 
[1] New target june 2011
[2] New target oktober 2011
[3] add steel spacers in magnet configuration