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Trace: • e-beam_evaporator • atc-1800 • group_meeting_talks • mask_aligner

sdb:p84

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Deposition date: 20060421

Target: Pr0.5Ca0.5MnO3compound target \\
Substrate: STO \\
Pressure: 3 mbar O2 \\
Flow: 40 ml/min \\
Current: 200 mA \\
Voltage: 419 V \\
Time: 75 min \\
Temp: 840 C \\
Remarks: -\\
----
XRR \\
Result: 16nm \\
----
RBS \\
Run: 20060512 \\
File: pr84_tilt3_rot3 \\
Result: 40 nm Pr 0.05 Ca 0.1 Mn 0.1 O 0.75 (sens. for O is low, O conc. is entangled with density)\\
Postscript: {{sdb:pr84_tilt3_rot3.ps}}

sdb/p84.txt · Last modified: 2006/05/15 15:21 by hessel

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