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====== Description ======
The spin coater in the cleanroom can be used for spin coating resists //only//.

====== Manual ======
  - Cover the spin bowl completely with aluminium foil
  - Switch on vacuum (black button)
  - Push 'change pre' and select a recipe
  - Clean bottom of sample, place it (centered) on the chuck
  - Mount a tip on the pipet
  - Open the resist bottle, fill the pipet at the surface, avoid getting air in
  - Push air bubbles out
  - Cover the sample with resist, push the start button and immediately place the cover
  - Dispose the pipet tip and **right away** close the resist bottle
  - When done, open cover, remove sample and bake
  - Clean resist spills with acetone

**Warning: recipes 1 and 2 (4000 and 6000 rpm) are standardized, do not change them! Use recipe 3 instead.**

To change between the standard recipes, you need to operate on the keyboard of the spin coater (that has no labels anymore). The keyboard has 10 buttons in 2 rows.

|  _1_  |  _2_  |
|  _3_  |  _4_  |
|  _5_  |  _6_  |
|  _7_  |  _8_  |
|  _9_  |  _10_  |

  * _1_ : edit 
  * _2_ : end edit
  * _5_ : _6_ move cursor
  * _7_ : (-) or 8 (+) to adjust
  * _10_ : Enter
  


====== Settings ======

^ Recipe ^  Step ^ RPM   ^  Ramp ^ Time ^
| 1      |  1    | 400   |  2    | 5    |
| 1      |  2    | 4000  |  2    | 1    |
| 1      |  3    | 6000  |  6    | 50   |
| 2      |  1    | 400   |  2    | 5    |
| 2      |  2    | 4000  |  4    | 1    |
| 2      |  3    | 4000  |  5    | 50   |

====== Miscellaneous ======
  * The digital log sheet: {{:wiki:spincoater_logbook.pdf|}}