cressington_sputter_coater_208hr
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Table of Contents
Description
Manual
Sample Loading
Available Targets
| Target Material | Atomic Number | Density in g/cm |
|---|---|---|
| Pt/Pd (80/20) | 78/46 | 19,52 |
| Cr | 24 | 7,19 |
| Ir | 77 | 22,56 |
Deposition Rates
| Material | Date | Sample ID | Etched Thickness | Etching time | Recipe | Gas | Rate |
|---|---|---|---|---|---|---|---|
| Al | 20151007 | Timothy | 9.9 nm | 180 sec | 10 | Ar, 3.0e-4 mbar | 0.055 nm/sec |
| Au | 20120404 | Boltje | 12.6 nm | 30 sec | 10 | Ar, 3.0e-4 mbar | 0.420 nm/sec |
| Co | 20120404 | Boltje | 7.4 nm | 30 sec | 10 | Ar, 3.0 e-4 mbar | 0.247 nm/sec |
cressington_sputter_coater_208hr.1438959926.txt.gz · Last modified: 2015/08/07 15:05 by steenis