cressington_sputter_coater_208hr
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Table of Contents
Description
Manual
Sample Loading
- Lift the top plate and remove the glass cylinder. Take care that the top-plate does not fall forward. The target can be damaged by striking the sample table.
- Place your sample, mounted on a stub, on the stage.
- Unlock the tilt lever of the stage
- Set tilt at desired angle and lock the tilt lever again
- If a thickness controlled process will be used change the angle of the thickness crystal so that it faces towards the sputter target
- Check that the stage isn't hindered by the wire of the thickness crystal by letting the stage rotate at the desired speed
- Replace glass cylinder and gently lower the top plate. Check that the top plate sits correctly on the glass cylinder.
- Turn on the system and allow the system to pump to better than 0,01 mbar and then wait for another 5 minutes
Available Targets
| Target Material | Atomic Number | Density in g/cm3 |
|---|---|---|
| Pt/Pd (80/20) | 78/46 | 19,52 |
| Cr | 24 | 7,19 |
| Ir | 77 | 22,56 |
Deposition Rates
| Target Material | Date | User | Tilt | Current | Time | Measurement | Result | Rate |
|---|---|---|---|---|---|---|---|---|
| Pt/Pd (80/20) | 40 mA | |||||||
| Cr | 80 mA | |||||||
| Ir | 40 mA |
cressington_sputter_coater_208hr.1438960465.txt.gz · Last modified: 2015/08/07 15:14 by steenis