NanoWiki

• stop pump
• turn valve to the right to vent
  • vent slowly to avoid samples flying around in the chamber
• load samples
• close vent valve (pointing down)
• start pump, hodor
• pump down to <100mTorr
• set valve to needle valve
  • should be going to previous setpoint (check logbook)
  • or change the setpoint
• wait for pressure to stabilize
• set RF (low, mid or high)
• when plasma ignites start timer
• turn off plasma when timer finishes
• close valve (down position)
• pump down to <100mTorr
• stop pump
• vent
• close vent valve and pump down

typical process:
500-900mTorr
1-3 minutes
High RF