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Plasma Cleaner manual

Only use bare substrate in the plasma cleaner, all exceptions should be discussed.

• Si
• SiO2
• glass/quartz

• Stop the vacuum pump
• Turn valve to the right to vent
  • vent slowly to avoid samples flying around in the chamber
• Load samples
• Close vent valve (valve pointing down)
• Start the vacuum pump, hodor
• Pump down to <100mTorr
• Set valve to the needle valve
  • if needle is open pressure should go to previous setpoint (check the logbook)
  • or change the setpoint
• Wait for pressure to stabilize
• set RF (low, mid or high)
• When plasma ignites start your timer
• Turn off RF when timer finishes
• Close valve (valve pointing down)
• Pump down to <100mTorr
• Stop the vacuum pump
• Vent (valve pointing right)
• Close vent valve (valve pointing down)
• Pump down

Typical cleaning process:
500-900mTorr
1-3 minutes
High RF

Tip seal change of vacuum pump