spin_coater
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Table of Contents
Description
The spin coater in the cleanroom can be used for spin coating resists only.
Manual
- Cover the spin bowl completely with aluminium foil
- Switch on vacuum (black button)
- Push 'change pre' and select a recipe
- Clean bottom of sample, place it (centered) on the chuck
- Mount a tip on the pipet
- Open the resist bottle, fill the pipet at the surface, avoid getting air in
- Push air bubbles out
- Cover the sample with resist, push the start button and immediately place the cover
- Dispose the pipet tip and right away close the resist bottle
- When done, open cover, remove sample and bake
- Clean resist spills with acetone
Warning: recipes 1 and 2 (4000 and 6000 rpm) are standardized, do not change them! Use recipe 3 instead.
To change between the standard recipes, you need to operate on the keyboard of the spin coater (that has no labels anymore). The keyboard has 10 buttons in 2 rows.
| 1 | 2 |
|---|---|
| 3 | 4 |
| 5 | 6 |
| 7 | 8 |
| 9 | 10 |
To change the recipe press the buttons in the following way:
- 1 edit
- 10 change recipe
- 7 (-) or 8 (+) to adjust
- 2 end edit
Settings
| Recipe | Step | RPM | Ramp | Time |
|---|---|---|---|---|
| 1 | 1 | 400 | 2 | 5 |
| 1 | 2 | 4000 | 2 | 1 |
| 1 | 3 | 6000 | 6 | 50 |
| 2 | 1 | 400 | 2 | 5 |
| 2 | 2 | 4000 | 4 | 10 |
| 2 | 3 | 4000 | 5 | 0 |
spin_coater.1205484301.txt.gz · Last modified: 2008/03/14 08:45 by edo