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--- cressington_sputter_coater_208hr [2015/08/10 07:44] – steenis
+++ cressington_sputter_coater_208hr [2015/08/10 08:04] (current) – steenis
@@ Line 44: / Line 44: @@
    - Clean inside of the glass cylinder with a tissue and ethanol to keep the glass clear.
    - Replace glass cylinder and gently lower the top plate. Leave the system vented.
+===== Manual process for Cr-sputtering =====
+   - Select manual with the auto/manual button.
+   - Select timer for a timed process or MTM for a thickness controlled process.
+        - Timed process, Change sputtering time by holding PAUSE/TEST and pressing the timer SET buttons. Time can be set between 5 and 300 seconds.
+        - Thickness controlled process
+             - Turn on the thickness monitor (MTM 20)
+             - Set the correct density according to the target material by pressing the DENSITY button once and find the correct setting by scrolling with the scroll buttons.
+             - Set the correct tooling factor according to stage tilt by pressing the TOOLING button once and find the correct setting by scrolling with the scroll buttons.
+             - Set desired coating thickness by holding the TERMINATOR button for one second. The value for the thickness will show up and can be adjusted with the scroll buttons.
+   - Set sputter current to 80 mA by holding the SET mA button and pressing the timer SET buttons.
+   - Set rotating speed of stage at desired value.
+   - Open argon flush valve for 10 seconds, then close.
+   - Pump to 0,001 mbar
+   - Open argon flush valve for 3 seconds, then close
+   - Open leak valve.
+   - When pressure reaches better than 0,03 mbar set MTM-20 to ZERO for a thickness controlled process
+   - Press START/STOP to start sputtering
+   - Initially the discharge will be pink of colour. It will turn blue when the surface layer of chromium oxide is removed and chromium begins toe sputter.
+   - When plasma turns blue open the shutter
+   - After sputtering note the final thickness for a thickness controlled process.
+   - Close shutter.
 ====== Available Targets ======
-^  Target Material  ^  Atomic Number  ^  Density in g/cm3  ^
+^  Target Material  ^  Atomic Number  ^  Density in g/cm³  ^
 |  Pt/Pd (80/20)  |  78/46  |  19,52  |
 |  Cr  |  24  |  7,19  |