Differences

This shows you the differences between two versions of the page.

--- ion_beam_etcher [2018/07/17 10:04] – [Pumping down] scholma
+++ ion_beam_etcher [2025/05/19 14:18] (current) – [When done] wigbout
@@ Line 5: / Line 5: @@
 processing typically low energies are used to avoid damage to the imaging resist.
-The system is equipped with a loadlock with a (sputtering gun, removed jan 2012) knudsen cell so that a deposition step
+The system is equipped with a loadlock with a knudsen cell so that a deposition step
 can be performed immediately after etching (a so called self aligned process).
 The substrate table can be tilted and can rotate in the tilt plane.
 ====== Manual Ion beam etcher ======
+Change the input source on the display to DisplayPort if it isn't on the correct input source.\\
+Switch over USB cables of mouse and keyboard.
 ===== Mounting sample on holder =====
@@ Line 42: / Line 44: @@
   * Set MFC setpoint to 0 with the software.
   * Set valve override to OFF. You're now able to write a setpoint to the MFC.
-  * Slowly increase setpoint in steps of 5% to pump away left over Ar in the line. Open MFC fully (valve override OPEN) when pressure doesn't increase anymore.
+  * Slowly increase setpoint in steps of 5% to pump away left over Ar in the line. Open MFC fully (100%) when pressure doesn't increase anymore.
-  * Put valve override to 'OFF' and put the setpoint to 0.
+  * Put the setpoint to 0 and put valve override to 'OFF'.
   * Wait (~30 mins) until pressure is <1.0e-5.
@@ Line 55: / Line 57: @@
   * Cool with N<sub>2</sub> if needed (Resist can become too hard to remove if not cooled, especially if you etch longer than 4 min).
-    * {{images:n2barrel.png}}
     * Check if N<sub>2</sub> barrel needs to be refilled.
     * Attach Hose
@@ Line 68: / Line 69: @@
   * Open green valve
   * Set Argon pressure to 2,5e-4 to 4.0e-4 mBar with program on the computer
-    * If you can't find the computerprogram to do this, switch the screen to the IBE computer.
-    * If you are on the right computer but the software seems to be closed, you can find the program by clicking on the terminal icon on top of the desktop. Type 'cd MFC/code', press 'enter', type 'python debiantest.py' and press 'enter' again. Enlarge the appearing window!
   * Turn on main power for ion beam (watch safety fuse)
   * Select recipe (#10)
@@ Line 76: / Line 75: @@
     * press 'enter'
     * press 'view recipe'
-  * Make sure the ion canon shutter is retracted (black vertical knob on the left) and doesn't touch the sample holder.
+  * **Make sure the ion canon shutter doesn't touch the sample holder.**
   * Press "source" on control panel (this step is optional, it is done automatically once you do the next step)
   * To start etching press "beam" on control panel
   * Elapsed time is shown on display. You must stop the system manually once the desired etching time is reached.
+  * Open shutter, start the timer
   * Press "source" to stop
   * Turn off main power for ion beam.
@@ Line 91: / Line 91: @@
 ===== When done =====
-  * Let ion gun cool by increasing Ar flow (1e-2 mbar, 2 min)
+  * Let ion gun cool by increasing Ar flow such that the pressure is at 1e-2 mbar (typically MFC: 20%) for about 2 min.
   * If you cooled your sample, let the sample warm up for at least 15 min (08-04-21: Or do 5 min and do another 10 mins at 1 bar) while pumping (this to avoid possible pollution of oil or other things on your priceless sample).
   * Close green Argon valve.
-  * Let the Argon be pumped out the conduct and set the Argon needle valve closed.
+  * Let the Argon be pumped out the conduct, increase the MFC setpoint slowly to 100% in steps of 5%. When the pressure doesn't is stabilizing open the MFC fully.
+  * Wait a few minutes and close MFC.
   * Set black Argon valve to neutral
   * Turn off turbo pump
-  * Turn off rotary pump
+  * Close valve to the rotary pump
-  * Wait until turbo pump has decelerated
   * Vent the system slowly with the "vent" switch (start with 1 sec)
-  * If you cooled with N<sub>2</sub>, you need to let your sample stay inside the lock at close to 1 bar (~10 mins) to let the sampleholder warm up. As long as it is below 0, Ice may form, once you remove it.
+  * Wait until turbo pump has decelerated
+  * If you cooled with N<sub>2</sub>, you need to let your sample stay inside the lock at close to 1 bar (~10 mins) to let the sample holder warm up. As long as it is below 0, Ice may form, once you remove it.
   * Remove sample holder
   * Pump chamber down for a few minutes with rotation pump (no turbo).
-  * Remove sample, clean sample holder with acetone and IPA.
+  * Turn on the Turbo (TP switch)
-  * Shut down rotation pump if you are the last person on the day.
+  * Remove sample, clean sample holder with Silver paint dilutent, acetone and/or IPA.
-  * Fill in the log sheets. COPIES OF THE LOG SHEET ARE HERE: {{wiki:ibe-logbookv2.xls}}.
+  * Fill in the logbook