plasma_cleaner_pdf-32g-2
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| plasma_cleaner_pdf-32g-2 [2023/02/02 14:14] – [Plasma Cleaner manual] scholma | plasma_cleaner_pdf-32g-2 [2023/02/24 07:56] (current) – [MANUAL] scholma | ||
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| ===== Plasma Cleaner manual ==== | ===== Plasma Cleaner manual ==== | ||
| - | + | {{ : | |
| ==== DO's and DONT's ==== | ==== DO's and DONT's ==== | ||
| - | + | Only use bare substrate in the plasma cleaner, all exceptions should be discussed. | |
| - | ==== Checking system status and before starting ==== | + | * Si |
| + | * SiO2 | ||
| + | * glass/ | ||
| ==== MANUAL ==== | ==== MANUAL ==== | ||
| - | * stop pump | + | * Load samples on the sample tray |
| - | * turn valve to the right to vent | + | * Start the vacuum pump while holding |
| - | * vent slowly to avoid samples flying around in the chamber | + | * Pump down to < |
| - | * load samples | + | * Set black valve to the needle valve |
| - | * close vent valve (pointing down) | + | * if needle valve is open the pressure |
| - | * start pump, hodor | + | |
| - | * pump down to < | + | |
| - | * set valve to needle valve | + | |
| - | * should | + | |
| * or change the setpoint | * or change the setpoint | ||
| - | * wait for pressure to stabilize | + | * Wait for pressure to stabilize |
| * set RF (low, mid or high) | * set RF (low, mid or high) | ||
| - | * when plasma ignites start timer | + | * When plasma ignites start your timer |
| - | * turn off plasma | + | * Turn off RF when timer finishes |
| - | * close valve (down position) | + | * Close black valve (valve pointing |
| - | * pump down to < | + | * Pump down to < |
| - | * stop pump | + | * Stop the vacuum |
| - | * vent | + | * Turn black valve to the right to vent |
| - | * close vent valve and pump down | + | * vent slowly to avoid samples flying around in the chamber |
| - | + | * Close black valve (valve pointing | |
| - | + | * close the door | |
| - | ==== Finishing up and leaving | + | * write in the logbook: name, date, sample, process conditions, any remarks |
| - | + | ||
| - | + | ||
| - | + | ||
| - | ==== Common problems, tips and tricks ==== | + | |
| - | + | ||
| - | + | ||
| ==== Recipes ==== | ==== Recipes ==== | ||
| - | typical | + | Typical cleaning |
| 500-900mTorr\\ | 500-900mTorr\\ | ||
| 1-3 minutes\\ | 1-3 minutes\\ | ||
| High RF | High RF | ||
| - | |||
| - | ==== Available accesoiries and tools ==== | ||
| === Maintenance === | === Maintenance === | ||
| + | Tip seal change of vacuum pump\\ | ||
| + | Cleaning sample tray and chamber\\ | ||
plasma_cleaner_pdf-32g-2.1675347295.txt.gz · Last modified: 2023/02/02 14:14 by scholma