Differences

This shows you the differences between two versions of the page.

--- plasma_cleaner_pdf-32g-2 [2023/02/03 13:17] – [Recipes] scholma
+++ plasma_cleaner_pdf-32g-2 [2023/02/24 07:56] (current) – [MANUAL] scholma
@@ Line 12: / Line 12: @@
 ==== MANUAL ====
-  * Stop the vacuum pump
+  * Load samples on the sample tray
-  * Turn valve to the right to vent
+  * Start the vacuum pump while holding the door, make sure black valve is pointing down
-    * vent slowly to avoid samples flying around in the chamber
-  * Load samples
-  * Close vent valve (valve pointing down)
-  * Start the vacuum pump, hodor
   * Pump down to <100mTorr
-  * Set valve to the needle valve
+  * Set black valve to the needle valve
-    * if needle is open pressure should go to previous setpoint (check the logbook)
+    * if needle valve is open the pressure should go to previous setpoint (check the logbook)
     * or change the setpoint
   * Wait for pressure to stabilize
@@ Line 26: / Line 22: @@
   * When plasma ignites start your timer
   * Turn off RF when timer finishes
-  * Close valve (valve pointing down)
+  * Close black valve (valve pointing down)
-  * Pump down to <100mTorr
+  * Pump down to <100mTorr to make sure etch products are removed from the chamber
   * Stop the vacuum pump
-  * Vent (valve pointing right)
+  * Turn black valve to the right to vent
-  * Close vent valve (valve pointing down)
+    * vent slowly to avoid samples flying around in the chamber
-  * Pump down
+  * Close black valve (valve pointing down)
+  * close the door
+  * write in the logbook: name, date, sample, process conditions, any remarks
-==== Common problems, tips and tricks ====
 ==== Recipes ====
 Typical cleaning process:\\
@@ Line 48: / Line 40: @@
 Tip seal change of vacuum pump\\
+Cleaning sample tray and chamber\\