plasma_cleaner_pdf-32g-2
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| Both sides previous revisionPrevious revisionNext revision | Previous revision | ||
| plasma_cleaner_pdf-32g-2 [2023/02/24 07:48] – [MANUAL] scholma | plasma_cleaner_pdf-32g-2 [2023/02/24 07:56] (current) – [MANUAL] scholma | ||
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| Line 29: | Line 29: | ||
| * Close black valve (valve pointing down) | * Close black valve (valve pointing down) | ||
| * close the door | * close the door | ||
| + | * write in the logbook: name, date, sample, process conditions, any remarks | ||
| ==== Recipes ==== | ==== Recipes ==== | ||
| Typical cleaning process:\\ | Typical cleaning process:\\ | ||
| Line 39: | Line 40: | ||
| Tip seal change of vacuum pump\\ | Tip seal change of vacuum pump\\ | ||
| + | Cleaning sample tray and chamber\\ | ||
plasma_cleaner_pdf-32g-2.1677224896.txt.gz · Last modified: 2023/02/24 07:48 by scholma