spin_coater
Differences
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| Both sides previous revisionPrevious revisionNext revision | Previous revision | ||
| spin_coater [2008/03/14 08:45] – edo | spin_coater [2017/02/08 13:49] (current) – [Manual] scholma | ||
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| ====== Description ====== | ====== Description ====== | ||
| The spin coater in the cleanroom can be used for spin coating resists //only//. | The spin coater in the cleanroom can be used for spin coating resists //only//. | ||
| - | |||
| ====== Manual ====== | ====== Manual ====== | ||
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| To change between the standard recipes, you need to operate on the keyboard of the spin coater (that has no labels anymore). The keyboard has 10 buttons in 2 rows. | To change between the standard recipes, you need to operate on the keyboard of the spin coater (that has no labels anymore). The keyboard has 10 buttons in 2 rows. | ||
| - | ^ 1 | 2 | | + | | |
| - | ^ 3 | 4 | | + | | |
| - | ^ 5 | 6 | | + | | |
| - | ^ 7 | 8 | | + | | |
| - | ^ 9 |10| | + | | |
| - | To change the recipe press the buttons in the following way: | + | * _1_ : edit |
| + | * _2_ : end edit | ||
| + | * _5_ : _6_ move cursor | ||
| + | * _7_ : (-) or 8 (+) to adjust | ||
| + | * _10_ : Enter | ||
| + | | ||
| - | - 1 edit | ||
| - | - 10 change recipe | ||
| - | - 7 (-) or 8 (+) to adjust | ||
| - | - 2 end edit | ||
| ====== Settings ====== | ====== Settings ====== | ||
| Line 40: | Line 40: | ||
| | 1 | 3 | 6000 | 6 | 50 | | | 1 | 3 | 6000 | 6 | 50 | | ||
| | 2 | 1 | 400 | | 2 | 1 | 400 | ||
| - | | 2 | 2 | 4000 | 4 | 10 | | + | | 2 | 2 | 4000 | 4 | 1 |
| - | | 2 | 3 | 4000 | 5 | 0 | + | | 2 | 3 | 4000 | 5 | 50 | |
| + | ====== Miscellaneous ====== | ||
| + | * The digital log sheet: {{: | ||
spin_coater.1205484301.txt.gz · Last modified: 2008/03/14 08:45 by edo