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wet_etching_recipes_and_rates [2006/11/10 16:35] alexwet_etching_recipes_and_rates [2006/11/10 16:36] (current) alex
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 +====== Materials ======
 +^Material         ^Etchant                                           ^ Temperature ^ Rate        ^
 +| Al              | Alkalies, i.e. AZ312MIF:H2O 1:1                  | RT          | ? nm/min    |
 +| MoGe            | 75% H3PO4 + 23% H2O + 2% HNO3                    | RT          | >~50 nm/min    |
 +| YBCO            |  5% h3PO4 + 95% H2O                              | RT          | ? nm/min    |
 +| GdNi            | 75% H3PO4 + 23% H2O + 2% HNO3                    | RT          | ? nm/min    |
  

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