wet_etching_recipes_and_rates
Materials
| Material | Etchant | Temperature | Rate |
|---|---|---|---|
| Al | Alkalies, i.e. AZ312MIF:H2O 1:1 | RT | ? nm/min |
| MoGe | 75% H3PO4 + 23% H2O + 2% HNO3 | RT | >~50 nm/min |
| YBCO | 5% h3PO4 + 95% H2O | RT | ? nm/min |
| GdNi | 75% H3PO4 + 23% H2O + 2% HNO3 | RT | ? nm/min |
wet_etching_recipes_and_rates.txt · Last modified: 2006/11/10 16:36 by alex