Table of Contents

Important!

Before operating an apparatus yourself you should have received instructions and you should have done the whole procedure several times yourself while supervised by someone qualified to use the apparatus. These manuals are by no means a 'go flag' to start experimenting on your own!

Manuals

Lithography Processes

Plasma Etching

Annealing

Vapor Deposition

Sputter Depostion

Inspection

Other utilities







Outdated Manuals