This is a pictured user's guide for the Raith 100 e-beam pattern generator (EBPG). The condensed version, which additionally is very useful as a checklist, can be found here.

You will use three different programmes when operating the EBPG:

1. e_line, which controls the actual patterning
2. VegaTC, the imaging software you use for controlling the vacuum and turning on the electron gun, finding your sample, focussing, changing probe current (PC) and some other important things
3. Raith protocol tool, which shows you the results of write field alignment procedures and some additional interesting information such as how long a patterning step took

Usually VegaTC is running continuously on the left screen. If it is not (or after a reboot), open it by clicking the shortcut on the desktop. You will see this window:

Note that the beam in the bottom right corner will be turned off when you start a new patterning session and after loading a sample.

In the centre you have the SEM image window, below that the measurement toolbar. If this toolbar isn't visible, you can make it show by INSERT COMMAND HERE. On the right side you have the control elements for the SEM, beam and vacuum. Before venting the chamber, note down the Column pressure in the log book, shown under Vacuum in the bottom right of the screen. It should show <9.0e-005 mbar if the chamber hasn't been vented in the past one or two hours. Then click VENT and confirm the dialogue to vent the chamber and load a sample.

After loading the sample, close the door and click PUMP. Make sure to push the door closed until you hear the sound of the roughing pump change. Otherwise the door won't seal properly and VegaTC will complain that it can't pull a vacuum after a while. Wait for the pressure to drop below 1.4e-004 mbar before you turn on the electron gun. A lower air pressure means higher life time of the electron gun's filament.

Once the pressure is below 2.5e-4mbar you can turn on the electron beam. If you have a little more time to spare (about 10 minutes more), turning on HV at lower pressures prolongs the filament life time. Turn on the gun by clicking on HV on the bottom right which will automatically turn on HEAT as well.

Once in a while, VegaTC shows a message about auto-heating the filament after you click on HV. If this happens before you have measured your beam current (see later in this guide), note down the current heating percentage and emission current in the comments section of the log book and perform an AUTO heat. This will adjust how much current is sent through the emission filament of the electron gun and improves performance and life time if done regularly. Also write down the new values.

It is recommended to allow the gun to heat up for at least 30 minutes prior to patterning. If you notice large fluctuations in beam current (more than ±0.01nA) you might want to allow for even more time to heat up. Typically, 60 to 90 minutes does the trick <CHECK WITH LUC OR MARCEL>. You can use the warm-up time to do all the necessary preparations like finding your sample, defining the origin, focussing and write field (WF) alignment. These are not sensitive to the kind of fluctuations that occur during heating and often take more than 30 minutes anyway.

e_line is the software you use to do all the patterning and moving around the stage. Double-click on the e-line logo on the desktop to start e_line.

e_line can be sensitive at times. If e_line is already open from another user, close it and wait for a couple of minutes (5 to 10 minutes). The software needs this time to fully shut down in the background. If you try to re-open it too quick it might crash and mandate a reboot.

If e_line crashes and it doesn't start up again, the computer unfortunately has to be rebooted.

Define the origin of the global coordinate system on your sample. Typically this is the lower left corner of your sample.