Differences

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--- ion_beam_etcher [2018/07/17 10:13] – [Description] scholma
+++ ion_beam_etcher [2025/05/19 14:18] (current) – [When done] wigbout
@@ Line 10: / Line 10: @@
 ====== Manual Ion beam etcher ======
-Change the input source on the display to VGA if it isn't on the correct input source.
+Change the input source on the display to DisplayPort if it isn't on the correct input source.\\
+Switch over USB cables of mouse and keyboard.
-Make sure shutter is not in contact with sample holder when starting the process!
 ===== Mounting sample on holder =====
@@ Line 44: / Line 44: @@
   * Set MFC setpoint to 0 with the software.
   * Set valve override to OFF. You're now able to write a setpoint to the MFC.
-  * Slowly increase setpoint in steps of 5% to pump away left over Ar in the line. Open MFC fully (valve override OPEN) when pressure doesn't increase anymore.
+  * Slowly increase setpoint in steps of 5% to pump away left over Ar in the line. Open MFC fully (100%) when pressure doesn't increase anymore.
-  * Put valve override to 'OFF' and put the setpoint to 0.
+  * Put the setpoint to 0 and put valve override to 'OFF'.
   * Wait (~30 mins) until pressure is <1.0e-5.
@@ Line 57: / Line 57: @@
   * Cool with N<sub>2</sub> if needed (Resist can become too hard to remove if not cooled, especially if you etch longer than 4 min).
-    * {{images:n2barrel.png}}
     * Check if N<sub>2</sub> barrel needs to be refilled.
     * Attach Hose
@@ Line 92: / Line 91: @@
 ===== When done =====
-  * Let ion gun cool by increasing Ar flow (1e-2 mbar, 2 min)
+  * Let ion gun cool by increasing Ar flow such that the pressure is at 1e-2 mbar (typically MFC: 20%) for about 2 min.
   * If you cooled your sample, let the sample warm up for at least 15 min (08-04-21: Or do 5 min and do another 10 mins at 1 bar) while pumping (this to avoid possible pollution of oil or other things on your priceless sample).
   * Close green Argon valve.