ion_beam_etcher
Differences
This shows you the differences between two versions of the page.
| Both sides previous revisionPrevious revisionNext revision | Previous revision | ||
| ion_beam_etcher [2020/01/21 09:12] – [Pumping down] scholma | ion_beam_etcher [2025/05/19 14:18] (current) – [When done] wigbout | ||
|---|---|---|---|
| Line 44: | Line 44: | ||
| * Set MFC setpoint to 0 with the software. | * Set MFC setpoint to 0 with the software. | ||
| * Set valve override to OFF. You're now able to write a setpoint to the MFC. | * Set valve override to OFF. You're now able to write a setpoint to the MFC. | ||
| - | * Slowly increase setpoint in steps of 0.5% to pump away left over Ar in the line. Open MFC fully (valve override OPEN) when pressure doesn' | + | * Slowly increase setpoint in steps of 5% to pump away left over Ar in the line. Open MFC fully (100%) when pressure doesn' |
| - | * Put valve override to ' | + | * Put the setpoint to 0 and put valve override to ' |
| * Wait (~30 mins) until pressure is <1.0e-5. | * Wait (~30 mins) until pressure is <1.0e-5. | ||
| Line 91: | Line 91: | ||
| ===== When done ===== | ===== When done ===== | ||
| - | * Let ion gun cool by increasing Ar flow (1e-2 mbar, 2 min) | + | * Let ion gun cool by increasing Ar flow such that the pressure is at 1e-2 mbar (typically MFC: 20%) for about 2 min. |
| * If you cooled your sample, let the sample warm up for at least 15 min (08-04-21: Or do 5 min and do another 10 mins at 1 bar) while pumping (this to avoid possible pollution of oil or other things on your priceless sample). | * If you cooled your sample, let the sample warm up for at least 15 min (08-04-21: Or do 5 min and do another 10 mins at 1 bar) while pumping (this to avoid possible pollution of oil or other things on your priceless sample). | ||
| * Close green Argon valve. | * Close green Argon valve. | ||
ion_beam_etcher.1579597946.txt.gz · Last modified: 2020/01/21 09:12 by scholma