ion_beam_etcher
Differences
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| Both sides previous revisionPrevious revisionNext revision | Previous revision | ||
| ion_beam_etcher [2025/05/19 14:09] – [Pumping down] wigbout | ion_beam_etcher [2025/05/19 14:18] (current) – [When done] wigbout | ||
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| Line 91: | Line 91: | ||
| ===== When done ===== | ===== When done ===== | ||
| - | * Let ion gun cool by increasing Ar flow (1e-2 mbar, 2 min) | + | * Let ion gun cool by increasing Ar flow such that the pressure is at 1e-2 mbar (typically MFC: 20%) for about 2 min. |
| * If you cooled your sample, let the sample warm up for at least 15 min (08-04-21: Or do 5 min and do another 10 mins at 1 bar) while pumping (this to avoid possible pollution of oil or other things on your priceless sample). | * If you cooled your sample, let the sample warm up for at least 15 min (08-04-21: Or do 5 min and do another 10 mins at 1 bar) while pumping (this to avoid possible pollution of oil or other things on your priceless sample). | ||
| * Close green Argon valve. | * Close green Argon valve. | ||
ion_beam_etcher.1747663791.txt.gz · Last modified: 2025/05/19 14:09 by wigbout